Product Features
MX61/MX61L

Advanced optical performance delivers a remarkable improvement in defect detection

The UIS2, further advanced optical system, delivers finer observation images; clear, high-contrast brightfield images with optimized color temperature and the highest detection precision in darkfield observation, and enables quick detection of minute scratches.
 Advanced optical performance delivers a remarkable improvement in defect detection

Aperture stop (AS) interlocks with magnification and observation mode automatically

The MX61/61L, users can preset AS in 14 steps for each objective power so that optimal image contrast is performed immediately, whenever the objective is changed. This eliminates the time and effort spent on AS adjustment, reduces operator fatigue and speeds up the inspection process.
 Aperture stop (AS) interlocks with magnification and observation mode automatically

Easy switching and addition of observation modes

Both microscopes offer with a single lever offer quick observation mode select ? brightfield, darkfield and optional cube. A transmitted light illumination unit can also be combined with both MX61/MX61L microscope stands.
 Easy switching and addition of observation modes

Diverse optional items promise to support of system upgrading and addition

Near infrared optical modules
Suitable for wafer bonding and wafer bump inspection

wafer bonding Contact pad of wafer bump s(Reverse side)
  Contact pad of wafer bump s(Reverse side)

Fluorescence illumination modules
For fluorescence observation, a mirror unit can be added in the slider. U*, B and G excitation mirror units are available; they are used for inspecting resist residue or organic LEDs.
*Since U excitation is applicable to some objectives, please contact Olympus representatives.

Fluorescence mirror units Particles on wafer
Fluorescence mirror units Particles on wafer

Transmitted illumination module MX-TILLA / MX-TILLB
Suitable for FPD and MEMS sensor inspection

Control panel of MX-TILLB Transmitted illumination module MX-TILLA / MX-TILLB
Control panel of MX-TILLB  
Color filter (Transmitted illumination)  
Color filter (Transmitted illumination)  

Motorized stage MS200 for wafer loader AL110-8 System
To locate automatically the inspection points on wafer

Wafer loader AL110-8 system Motorized stage MS200
Wafer loader AL110-8 system Motorized stage MS200

SEMIS2/S8 compliance ensures safety and reliability

The MX61/61L comply in full with international specifications and standards such as SEMI S2/S8, CE, and UL, and respond to environmental and safety issues with a high level of reliability.