Product Specifications
MX51

 

MX51

Optical system

UIS2 optics(infinity-corrected)

Main body (frame)

Built-in power supply for reflected light illumination (12 V 100 W halogen lamp)
Coarse/fine adjustment coaxial knob system
Stroke per rotation of the coarse adjustment knob: 17.85 mm, stroke per rotation of the fine adjustment knob: 0.1 mm
Vertical stroke: 32 mm (2 mm upward, 30 mm downward)
Mechanism for adjusting the weight of the coarse adjustment knob
Coarse adjustment upper-limit stopper
Complies with SEMI S2/S8

Reflected light
illumination system

A reflected-light illumination unit is supplied as an add-on part. It can be used with the observation tube of 1x and the super widefield of 1x (FN26.5).

BX-RLA2
Reflected light illuminator for brightfield and darkfield

Observation switching: Between BF and DF slide system

Observation methods:

(1)

Reflected brightfield

(2)

Reflected darkfield

(3)

Reflected DIC

(4)

Simple reflected polarized light

(5)

Reflected IR (infrared) observation

(6)

Transmitted light brightfield (with an optional unit)

BX-URA2
Universal reflected fluorescence illuminator

Observation switching: Turret-type mirror units
(a maximum of 6 pieces)

Observation methods:

(1)

Reflected brightfield

(2)

Reflected darkfield

(3)

Reflected DIC

(4)

Simple reflected polarized light

(5)

Reflected fluorescence

(6)

Transmitted light brightfield (with an optional unit)

Lamp housing

Halogen lamp housing:
U-LH100L-3
Built-in power supply

Mercury lamp housing:
U-LH100HGAPO
Power supply BH2-RFL-T3 is required

Transmitted light
illumination

MX-TILLK LG-PS2 fiber guide illumination unit is needed (to be used together with the MX-SIC6R2).

Electric system

100-120 / 220-240V, 1.8A / 0.8A, 50/60Hz
Continuously variable brightness adjusting knob

Observation tube

U-BI30-2 widefield binocular tube, U-TR30-2 widefield trinocular tube, U-ETR-3 widefield erect image trinocular tube (field number: 22)
U-SWTR-3 super widefield trinocular tube, MX-SWETTR super widefield erect image tilting trinocular tube (field number: 26.5)

Revolver

Manual: U-5RE-2, U-6RE, U-P6RE, U-D6RE, U-D7RE, U-5BDRE, U-D5BDRE, U-P5BDRE, U-D6BDRE
Motorized: U-D6REMC, U-D5BDREMC, U-P5REMC

Stage

U-SIC4R2/SIC4L2
(to be used with MX-STAD)
Handle to the lower right (or left) of the coaxis, 4 x 4 inch
Drive method: Rack-and-pinion
Lock mechanism: Locked in the Y direction using a locking lever
3- or 4-inch wafer holders can be mounted using an optional plate.

MX-SIC6R2
Handle to the lower right of the coaxis, 6 x 6 inch
Drive method: Belt drive
Stroke: 158(X) mm x 158(Y) mm
Range of transmitted light illumination: 100 x 100 mm

Outside dimensions, weight

Dimensions: Approximately 430 (W)x 591 (D) x 495 (H)
Weight: Approx. 26 kg