Automatic Wafer Loaders

Non-Contact centering
Super clean and fast wafer transfer
Micro, Top Macro, Back Macro inspection
Sequential or Sampling inspection mode
8” wafers handling capability

• High reliability and safety
  Maintaining the high level of reliability and safety achieved by the AL110 series, AL120-128 provides an additional feature to allow the user to automatically inspect 300mm wafers under a microscope. With the option to handle 8” wafer in the same machine.
• 300mm wafer and FOSB (Front Opening Shipping Box) compatible
  Inspection modes are selectable. The design of AL120-128 is optimized to increase the operability in the 300mm wafer back-end process. FOSB and Auto FOSB are compatible as the standard type of cassette. Load port (FOUP Opener) type is optional.
• Macro illumination unit (optional)
  Fiber light guide illumination is available to enable the user to inspect wafers for foreign particles, scratches, film undulations, etc.

Handle very thin wafer from 90 µm to 200 µm in full cassette
Cross slot wafer detection up to 2 slots
Non-Contact centering
Super clean and fast wafer transfer
Micro, Top Macro, Back Macro inspection
Sequential or Sampling inspection mode

• Two types of wafer loaders to cover 150mm-200mm wafer sizes
• Multiple cassettes capability
• Register up to 10 types of wafer setting
• Complete and 360° macro inspection of the wafer’s back surface
• Different transfer speed and able to set in the recipe
• Free setting of inspection modes
• Making operation easier and more comfortable
• Outstanding safety and reliability
• Safe wafer transfer with scanning stage
• Fully motorized control for superior inspection efficiency